Plasma Processing of Semiconductors formatIsbn:Hardcover - 9780792345671 1Die Formel von Kunitomo und
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Plasma Processing of Semiconductors formatIsbn:Hardcover - 9780792345671 1Die Formel von Kunitomo undPlasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate level students seeking an introduction to the field as well as established
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